Moez El-Massry
at Si-Ware Systems
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 February 2020
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Mirrors, Reflection, Metals, Silicon, Reflectivity, Micromirrors, Aluminum, Deep reactive ion etching, Systems modeling

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