Mr. Mohamad Rezaei
at Simon Fraser Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 13, 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Fabrication, Infrared imaging, Electron beam lithography, Polymers, Ultraviolet radiation, Chromium, Scanning electron microscopy, Photoresist materials, Nanoimprint lithography, Optical storage

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