Mohamad Rezaei
at Simon Fraser Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2015 Paper
Mohamad Rezaei, Hao Jiang, Reza Qarehbaghi, Mohammad Naghshineh, Bozena Kaminska
Proceedings Volume 9374, 93740O (2015) https://doi.org/10.1117/12.2080719
KEYWORDS: Nanoimprint lithography, Electron beam lithography, Chromium, Polymers, Optical storage, Ultraviolet radiation, Infrared imaging, Photoresist materials, Fabrication, Scanning electron microscopy

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