Dr. Mohamed Al-Imam
Engineer at Siemens EDA
SPIE Involvement:
Publications (22)

Proceedings Article | 16 March 2016 Paper
Jong-hyun Lee, Chin Kim, Minsoo Kang, Sungwook Hwang, Jae-seok Yang, Mohammed Harb, Mohamed Al-Imam, Kareem Madkour, Wael ElManhawy, Joe Kwan
Proceedings Volume 9781, 97810J (2016) https://doi.org/10.1117/12.2218806
KEYWORDS: Defect detection, New and emerging technologies, Process modeling, Design for manufacturing, Silicon, Design for manufacturability, Particles, Visualization, Lithography

Proceedings Article | 15 March 2012 Paper
Jae-Hyun Kang, Naya Ha, Joo-Hyun Park, Byung-Moo Kim, Seung Weon Paek, Hungbok Choi, Kee Sup Kim, Ahmed Mohy, Shady Abdelwahed, Mohamed Imam
Proceedings Volume 8327, 83270P (2012) https://doi.org/10.1117/12.917998
KEYWORDS: Semiconducting wafers, Metals, Process modeling, Image processing, Design for manufacturing, Chemical mechanical planarization, Optical proximity correction, 3D modeling, Photovoltaics, Scanning electron microscopy

Proceedings Article | 14 October 2011 Paper
Ahmed Omran, Jochen Schacht, Jully Pan, Junjiang Lei, Le Hong, Mohamed Al-Imam, Nick Cobb, Regina Shen, Ryan Chou
Proceedings Volume 8166, 81663I (2011) https://doi.org/10.1117/12.896677
KEYWORDS: Optical proximity correction, Feedback control, Photomasks, Logic, Visualization, Semiconducting wafers, Diffraction, Lithography, Detection and tracking algorithms, Critical dimension metrology

Proceedings Article | 4 March 2010 Paper
Proceedings Volume 7640, 76401G (2010) https://doi.org/10.1117/12.846276
KEYWORDS: Calibration, Process modeling, Statistical modeling, Data modeling, Photoresist processing, Lithography, Computer simulations, Image processing, Metrology, Optical proximity correction

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 727427 (2009) https://doi.org/10.1117/12.813975
KEYWORDS: Calibration, Optical proximity correction, Process modeling, Databases, Data modeling, Geometrical optics, Resolution enhancement technologies, Silicon, Lithography, Photomasks

Showing 5 of 22 publications
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