Dr. Mohamed Al-Imam
Engineer at Mentor Graphics Egypt
SPIE Involvement:
Publications (22)

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Defect detection, Visualization, Particles, Silicon, Design for manufacturing, Process modeling, New and emerging technologies, Design for manufacturability

Proceedings Article | 15 March 2012 Paper
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Photovoltaics, Metals, Image processing, 3D modeling, Scanning electron microscopy, Design for manufacturing, Optical proximity correction, Semiconducting wafers, Process modeling, Chemical mechanical planarization

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Lithography, Diffraction, Logic, Detection and tracking algorithms, Visualization, Photomasks, Optical proximity correction, Critical dimension metrology, Feedback control, Semiconducting wafers

Proceedings Article | 4 March 2010 Paper
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Metrology, Data modeling, Calibration, Image processing, Computer simulations, Optical proximity correction, Photoresist processing, Statistical modeling, Process modeling

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Data modeling, Calibration, Databases, Silicon, Photomasks, Optical proximity correction, Geometrical optics, Process modeling, Resolution enhancement technologies

Showing 5 of 22 publications
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