Dr. Mohamed Al-Imam
Engineer at Mentor Graphics Egypt
SPIE Involvement:
Author
Publications (22)

Proceedings Article | 16 March 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Defect detection, New and emerging technologies, Process modeling, Design for manufacturing, Silicon, Design for manufacturability, Particles, Visualization, Lithography

Proceedings Article | 15 March 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Semiconducting wafers, Metals, Process modeling, Image processing, Design for manufacturing, Chemical mechanical planarization, Optical proximity correction, 3D modeling, Photovoltaics, Scanning electron microscopy

Proceedings Article | 14 October 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Optical proximity correction, Feedback control, Photomasks, Logic, Visualization, Semiconducting wafers, Diffraction, Lithography, Detection and tracking algorithms, Critical dimension metrology

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Calibration, Process modeling, Statistical modeling, Data modeling, Photoresist processing, Lithography, Computer simulations, Image processing, Metrology, Optical proximity correction

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Calibration, Optical proximity correction, Process modeling, Databases, Data modeling, Geometrical optics, Resolution enhancement technologies, Silicon, Lithography, Photomasks

Showing 5 of 22 publications
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