Dr. Mohamed S. El-Morsi
Postdoctoral at Univ of Wisconsin Madison
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 21, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Computational fluid dynamics, Microfluidics, Data modeling, Capillaries, Image processing, Immersion lithography, Semiconducting wafers, Fluid dynamics, Liquids, Protactinium

SPIE Journal Paper | January 1, 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Contamination, Semiconducting wafers, Immersion lithography, Diffusion, Microfluidics, Absorption, Liquids, Water, Transmittance, Photoresist processing

SPIE Journal Paper | January 1, 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Semiconducting wafers, Immersion lithography, Liquids, Quartz, Image processing, Microfluidics, Cameras, Glasses, Fluid dynamics, Calcium

PROCEEDINGS ARTICLE | December 6, 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Computational fluid dynamics, Gases, Computing systems, 3D modeling, Ion beams, Photomasks, Statistical modeling, Photomask technology, Systems modeling, Process modeling

PROCEEDINGS ARTICLE | December 6, 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Refractive index, Imaging systems, Cameras, Water, Image processing, Nitrogen, Immersion lithography, Semiconducting wafers, Fluid dynamics, Liquids

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