Dr. Mohamed Ramadan
at Photronics Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 September 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Computer simulations, Photomasks, Machine learning, Source mask optimization, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Process modeling, Resolution enhancement technologies

Proceedings Article | 26 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Electron beam lithography, Image processing, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Line edge roughness, Semiconducting wafers, Stochastic processes

Proceedings Article | 3 October 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Lithography, Photomasks, Optical proximity correction

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