Dr. Mohamed Talbi
at IBM Corp
SPIE Involvement:
Publications (7)

Proceedings Article | 25 September 2010 Paper
Dongbing Shao, Bidan Zhang, Sajan Marokkey, Todd Bailey, Derren Dunn, Emily Gallagher, Yea-Sen Lin, Takashi Murakami, Seiji Nakagawa, Chandrasekhar Sarma, Mohamed Talbi
Proceedings Volume 7823, 78230U (2010) https://doi.org/10.1117/12.865131
KEYWORDS: Photomasks, Data modeling, Calibration, 3D modeling, Semiconducting wafers, Scanning electron microscopy, Optical proximity correction, Photoresist processing, Process modeling, Silicon

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7641, 76410B (2010) https://doi.org/10.1117/12.846637
KEYWORDS: 3D modeling, Critical dimension metrology, Data modeling, Process modeling, Scanning electron microscopy, Semiconducting wafers, Etching, Optical lithography, Printing, 3D image processing

Proceedings Article | 13 March 2010 Paper
Mohamed Talbi, Amr Abdo, Todd Bailey, Will Conley, Derren Dunn, Masashi Fujimoto, John Nickel, No Young Chung, Sajan Marokkey, Si Hyeung Lee, Chandrasekhar Sarma, Dongbing Shao, Ramya Viswanathan
Proceedings Volume 7640, 76401D (2010) https://doi.org/10.1117/12.846466
KEYWORDS: 3D modeling, Photoresist materials, Data modeling, Calibration, Scanning electron microscopy, Critical dimension metrology, Photomasks, 3D image processing, Statistical modeling, Optical lithography

Proceedings Article | 5 April 2007 Paper
Proceedings Volume 6518, 65181E (2007) https://doi.org/10.1117/12.712718
KEYWORDS: Optical proximity correction, Metrology, Data modeling, Pattern recognition, Semiconducting wafers, Reticles, Time metrology, Target recognition, Optical lithography, Quality measurement

Proceedings Article | 20 October 2006 Paper
Proceedings Volume 6349, 634923 (2006) https://doi.org/10.1117/12.686093
KEYWORDS: Optical proximity correction, Data modeling, Performance modeling, Diffusion, Optics manufacturing, Scanning electron microscopy, Model-based design, Calibration, Apodization, Optical lithography

Showing 5 of 7 publications
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