Dr. Mohammed J. Nasrullah
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, FT-IR spectroscopy, Deep ultraviolet, Polymers, Ultraviolet radiation, Chemistry, Photoresist materials, Polymerization, Picosecond phenomena, Manganese

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