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Mohit Gupta
at imec
SPIE Involvement:
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Publications (1)
Proceedings Article | 20 March 2019 Presentation + Paper
Optimization of read and write performance of SRAMs for node 5nm and beyond
Proceedings Volume 10962, 1096203 (2019) https://doi.org/10.1117/12.2515162
KEYWORDS: Resistance, Extreme ultraviolet, System on a chip, Optical lithography, Capacitance, Logic, Laser induced breakdown spectroscopy, Transistors, Fabrication
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