Dr. Mojgan Daneshmand
Assistant Professor at Univ of Alberta
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 9, 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Gold, Switches, Chromium, Scanning electron microscopy, Photomasks, Beam shaping, Mechanical engineering, Semiconducting wafers, Yield improvement

PROCEEDINGS ARTICLE | February 16, 2004
Proc. SPIE. 5648, Smart Materials III
KEYWORDS: Microelectromechanical systems, Semiconductors, Actuators, Gold, Oxides, Switches, Capacitors, Etching, Capacitance, Telecommunications

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