Dr. Mojgan Daneshmand
Assistant Professor at Univ of Alberta
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Switches, Microelectromechanical systems, Semiconducting wafers, Gold, Photomasks, Chromium, Scanning electron microscopy, Yield improvement, Mechanical engineering, Beam shaping

Proceedings Article | 16 February 2004
Proc. SPIE. 5648, Smart Materials III
KEYWORDS: Microelectromechanical systems, Capacitors, Switches, Oxides, Telecommunications, Gold, Actuators, Etching, Capacitance, Semiconductors

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