Moon Gyu Sung
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (9)

Proceedings Article | 20 October 2006 Paper
Proceedings Volume 6349, 63494H (2006)
KEYWORDS: Photomasks, Transmittance, Polarization, Critical dimension metrology, Diffractive optical elements, Solids, Etching, Scanning electron microscopy, Semiconducting wafers, Quartz

Proceedings Article | 10 May 2005 Paper
Yo-Han Choi, Moon-Kyu Sung, Sang-Hyun Lee, Ji-Hyung Lee, Jin-Hong Park, Ji-Hyun Choi, Seong-Yong Moon, Sung-Woon Choi, Woo-Sung Han
Proceedings Volume 5752, (2005)
KEYWORDS: Neural networks, Neurons, Optical simulations, Image segmentation, Quartz, Edge detection, Artificial intelligence, Photomasks, Inspection, Image processing

Proceedings Article | 28 August 2003 Paper
Sung-Yong Cho, Won-Suk Ahn, Won-Il Cho, Moon-Gyu Sung, Yong-Hoon Kim, Sung-Woon Choi, Hee-Sun Yoon, Jung-Min Sohn
Proceedings Volume 5130, (2003)
KEYWORDS: Particles, Inspection, Dry etching, Photomasks, Reticles, Manufacturing, Critical dimension metrology, Scanning electron microscopy, Etching, Chromium

Proceedings Article | 28 August 2003 Paper
Sung-Jae Han, Sang-Yong Yu, Moon-Gyu Sung, Yong-Hoon Kim, Hee-Sun Yoon, Jung-Min Sohn
Proceedings Volume 5130, (2003)
KEYWORDS: Air contamination, Contamination, Photomasks, Manufacturing, Inspection, Carbon, Contamination control, Lithography, Light sources, Transmittance

Proceedings Article | 27 December 2002 Paper
Proceedings Volume 4889, (2002)
KEYWORDS: Photomasks, Critical dimension metrology, Error analysis, Photoresist processing, Data modeling, Quantitative analysis, Chemically amplified resists, Integrated circuits, Semiconducting wafers, Etching

Showing 5 of 9 publications
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