Dr. Moon-Kyu Kwak
at Univ of Michigan
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 February 2012 Paper
Proceedings Volume 8249, 82490O (2012) https://doi.org/10.1117/12.910158
KEYWORDS: Photomasks, Nanolithography, Lithography, Nanostructures, Nanostructuring, Printing, Optical lithography, Near field, Ultraviolet radiation, Glasses

Proceedings Article | 9 September 2008 Paper
Moon Kyu Kwak, Pilnam Kim, Jae Kwan Kim, Chan Ick Park, Hye Sung Cho, Kahp Y. Suh
Proceedings Volume 7039, 70390D (2008) https://doi.org/10.1117/12.794421
KEYWORDS: Metals, Positron emission tomography, Adhesives, Ultraviolet radiation, Gold, Aluminum, Polarizers, Scanning electron microscopy, Optical lithography, Silicon

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