Dr. Moon-Kyu Kwak
at Univ of Michigan
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 February 2012
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Photomasks, Nanolithography, Lithography, Nanostructures, Nanostructuring, Printing, Optical lithography, Near field, Ultraviolet radiation, Glasses

Proceedings Article | 9 September 2008
Proc. SPIE. 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V
KEYWORDS: Metals, Positron emission tomography, Adhesives, Ultraviolet radiation, Gold, Aluminum, Polarizers, Scanning electron microscopy, Optical lithography, Silicon

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