Dr. Moon-Kyu Kwak
at Univ of Michigan
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 February 2012 Paper
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Lithography, Nanostructures, Optical lithography, Nanostructuring, Glasses, Ultraviolet radiation, Printing, Near field, Photomasks, Nanolithography

Proceedings Article | 9 September 2008 Paper
Proc. SPIE. 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V
KEYWORDS: Gold, Optical lithography, Metals, Ultraviolet radiation, Silicon, Polarizers, Scanning electron microscopy, Aluminum, Adhesives, Positron emission tomography

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