Moonsuk Yi
at Lawrence Berkeley National Lab
SPIE Involvement:
Publications (5)

Proceedings Article | 16 June 2003 Paper
Proceedings Volume 5037, (2003)
KEYWORDS: Reflectivity, Photomasks, Extreme ultraviolet lithography, Silicon carbide, Multilayers, Carbon, Silicon, Yield improvement, Ion beams, Critical dimension metrology

Proceedings Article | 27 December 2002 Paper
Proceedings Volume 4889, (2002)
KEYWORDS: Inspection, Extreme ultraviolet, Photomasks, Defect detection, Particles, Gold, Extreme ultraviolet lithography, Semiconducting wafers, Optical spheres, Multilayers

Proceedings Article | 1 July 2002 Paper
Proceedings Volume 4688, (2002)
KEYWORDS: Multilayers, Reflectivity, Photomasks, Extreme ultraviolet lithography, Extreme ultraviolet, Silicon, Ion beams, Molybdenum, Particles, Lithography

Proceedings Article | 1 July 2002 Paper
Moonsuk Yi, Min-Cheol Park, Paul Mirkarimi, Cindy Larson, Jeffrey Bokor
Proceedings Volume 4688, (2002)
KEYWORDS: Extreme ultraviolet lithography, Inspection, Photomasks, Gold, Optical spheres, Scanners, Defect inspection, Multilayers, Reflectivity, Extreme ultraviolet

Proceedings Article | 7 July 1997 Paper
Moonsuk Yi, Ohyun Kim, Srinivas Bollepalli, Mumit Khan, Franco Cerrina
Proceedings Volume 3048, (1997)
KEYWORDS: Image quality, Image processing, Photomasks, Lithography, X-ray lithography, Gold, Image analysis, Semiconducting wafers, X-rays, Image acquisition

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