Dr. Moorthi Palaniapan
at National Univ of Singapore
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 February 2009
Proc. SPIE. 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
KEYWORDS: Microelectromechanical systems, Resonators, Sensors, Reliability, Scanning electron microscopy, Transducers, Phonons, Acoustics, Temperature metrology, Protactinium

Proceedings Article | 30 December 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Microelectromechanical systems, Resonators, Imaging systems, Scanning electron microscopy, Transducers, Measurement devices, Phonons, Acoustics, Motion measurement, Network security

Proceedings Article | 21 December 2007
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Microelectromechanical systems, MATLAB, Microresonators, Resonators, Electrodes, Metals, Silicon, Finite element methods, Optical simulations, Beam shaping

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top