Dr. Mordechai Rothschild
Leader of Submicrometer ResGrp at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (69)

SPIE Journal Paper | 19 November 2019
JM3 Vol. 18 Issue 04
KEYWORDS: Photomasks, Optical lithography, Etching, Microsystems, Grayscale lithography, Device simulation, Photoresist processing, Photoresist materials, Liquids, Lithography

Proceedings Article | 17 May 2019 Paper
Proc. SPIE. 11010, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XX
KEYWORDS: Thin films, Sensors, Spectroscopy, Reflectivity, Colorimetry, Biological and chemical sensing, Toxic industrial chemicals, Chemical fiber sensors, Absorption

Proceedings Article | 31 May 2018 Paper
Proc. SPIE. 10629, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX
KEYWORDS: Light emitting diodes, Sensors, Copper, Ions, Reflectivity, Colorimetry, Chemical analysis, Biological and chemical sensing, Toxic industrial chemicals, Absorption

Proceedings Article | 26 October 2017 Paper
Proc. SPIE. 10343, Metamaterials, Metadevices, and Metasystems 2017
KEYWORDS: Amorphous silicon, Thin films, Nanostructures, Polymethylmethacrylate, Scattering, Glasses, Solar cells, Reflectivity, Aluminum, Absorption

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Electron beam lithography, Etching, Silicon, Resistance, Photoresist materials, Maskless lithography, Microfabrication, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Showing 5 of 69 publications
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