Mr. Morey T. Roscrow Profile

Morey T. Roscrow

Application Engineer at Seagate Technology LLC

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 11 August 2008 Paper

Micro Fabry-Perot sensor for surface measurement

Morey Roscrow, Bryan Clark, Gregory Toker, Andrei Brunfeld

Proceedings Volume 7063, 70630U (2008) https://doi.org/10.1117/12.798135

KEYWORDS: Inspection, Interferometry, Scattering, Surface finishing, Fabry–Perot interferometers, Resonators, Interferometers, Head, Mirrors, Laser scattering

Read Abstract +

A high accuracy surface inspection system for testing polished surfaces is based on a Fabry-Perot resonator. The inspected surface serves as a relay mirror in a cat-eye retroreflector incorporated into the resonating cavity, which makes the optical configuration insensitive to surface tilts. The laser wavelength is swept periodically over a given range, and the local surface height is obtained by timing the resonance occurrence during each sweep. An additional highly stable reference Fabry-Perot interferometer using the same laser is employed for obtaining differential measurements, yielding absolute height values, distinguishing between up and down defects. Due to the finesse of the multi-beam Fabry Perot interferometer relative to the two-beam Michelson interferometer response function, the height sensitivity is greatly enhanced. In order to detect small contamination particles, the interferometer was supplemented by a scattering detection channel integrated into the same compact optical head. The combination of the bright-field interferometric signal, yielding both the phase (surface height) and amplitude (surface reflectivity), and the dark-field scattering channel, allows one to build a sensitive and reliable defect detection and classification procedure. The interferometer was incorporated into high-speed high-accuracy in-line machines for inspection of the surfaces in data storage applications. With a 0.2 Angstroms resolution, the height rms repeatability at a surface scanning speed of 40 m/s is 1.5 Angstroms.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years