Ming-Chien Chiu
at Powerchip Semiconductor Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Lithography, Optical lithography, Etching, Image processing, Scanning electron microscopy, Process control, Photomasks, Double patterning technology, Chemical reactions, Photoresist processing

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Optical lithography, Etching, Scanners, Manufacturing, Line width roughness, Double patterning technology, Line edge roughness, Semiconducting wafers, 193nm lithography

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