Dr. Mosong Cheng
Assistant Professor at Texas A&M Univ
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Resolution enhancement technologies, Photomasks, Optical proximity correction, Semiconducting wafers, Silicon, Image segmentation, Very large scale integration, Optimization (mathematics), Diffraction

SPIE Journal Paper | 1 July 2005
JM3 Vol. 4 Issue 03
KEYWORDS: Diffusion, Polymers, Chemically amplified resists, Capacitance, Semiconducting wafers, Resistance, Dielectrics, Chemical analysis, Mathematical modeling, Capacitors

Proceedings Article | 23 May 2005
Proc. SPIE. 5846, Noise and Information in Nanoelectronics, Sensors, and Standards III
KEYWORDS: Bacteria, Ions, Physics, Injuries, Mirrors, Clouds, Sensors, Diffusion, Linear filtering, Biology

Proceedings Article | 23 May 2005
Proc. SPIE. 5841, Fluctuations and Noise in Biological, Biophysical, and Biomedical Systems III
KEYWORDS: Bacteria, Ions, Bridges, Stochastic processes, Diagnostics, Molecular bridges, Pathogens, Adsorption, Amplifiers, Field effect transistors

Proceedings Article | 23 May 2005
Proc. SPIE. 5844, Noise in Devices and Circuits III
KEYWORDS: Bacteria, Ions, Sensors, Field effect transistors, Signal detection, Polymethylmethacrylate, Solid state electronics, Electron beam lithography, Molecules, Microfluidics

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Liquids, 3D modeling, Polarization, Photomasks, Immersion lithography, Image quality, Lithographic illumination, Lithography, Water, Light

Showing 5 of 20 publications
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