Motoki Yako
at Univ of Tokyo
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 25, 2018
Proc. SPIE. 10823, Nanophotonics and Micro/Nano Optics IV
KEYWORDS: Photonic devices, Argon, Germanium, Silicon, Atomic force microscopy, Transmission electron microscopy, Scanning transmission electron microscopy

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9367, Silicon Photonics X
KEYWORDS: Modulation, Silica, Waveguides, Germanium, Silicon, Modulators, Scanning electron microscopy, Finite element methods, Photomasks, Absorption

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