Prof. Mu Chiao Profile

Prof. Mu Chiao

at Univ of British Columbia

SPIE Involvement:

Author

Proceedings Article | 30 December 2008 Paper

Investigation of repeatability of sol-gel iridium oxide pH sensor on flexible substrate

Wen-Ding Huang, Lun-Chen Hsu, Jianqun Wang, Thermpon Ativanichayaphong, Sanchali Deb, Mu Chiao, J. C. Chiao

Proceedings Volume 7269, 726916 (2008) https://doi.org/10.1117/12.810675

KEYWORDS: Sensors, Sol-gels, Electrodes, Silver, Oxides, Iridium, Polymers, Environmental sensing, Chromium, Ions

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Proceedings Article | 4 January 2008 Paper

New developments on polymer-based MEMS phase shifters

Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Mu Chiao, J.-C. Chiao

Proceedings Volume 6836, 68360I (2008) https://doi.org/10.1117/12.754991

KEYWORDS: Phase shifts, Microelectromechanical systems, Bridges, Polymers, Dielectrics, Capacitance, Silicon, Waveguides, Glasses, Telecommunications

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Proceedings Article | 4 January 2008 Paper

An optical scanner based on cantilever-type electrostatic zipping actuators

Smitha M. Rao, Praveen Pandojirao-Sunkojirao, Naresh Dhaubanjar, Mu Chiao, J.-C. Chiao

Proceedings Volume 6836, 683617 (2008) https://doi.org/10.1117/12.767801

KEYWORDS: Actuators, Electrodes, Optical scanning, Gold, Reflectivity, Mechanical engineering, Scanning electron microscopy, Structural design, Optical fibers, Dielectrics

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Proceedings Article | 8 January 2007 Paper

A cantilever-type electrostatic zipping actuator

Naresh Dhaubanjar, Smitha M. Rao, Ying Cai, Dan Popa, Mu Chiao, J.-C. Chiao

Proceedings Volume 6414, 641421 (2007) https://doi.org/10.1117/12.695959

KEYWORDS: Actuators, Electrodes, Dielectrics, Gold, Mechanical engineering, Finite element methods, Temperature metrology, Microelectromechanical systems, Scanning electron microscopy, Electrical breakdown

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Proceedings Article | 8 January 2007 Paper

Investigation of vertical displacement thermal actuators

Naresh Dhaubanjar, Smitha M. Rao, Hsu Lun-Chen, Matthew Luquire, Dan Popa, Mu Chiao, Harry Stephanou, J.- C. Chiao

Proceedings Volume 6414, 641420 (2007) https://doi.org/10.1117/12.695958

KEYWORDS: Actuators, Sensors, Resistance, Finite element methods, Microscopes, Silicon, Thermal modeling, Reflectivity, Capacitors, Optical switching

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Proceedings Article | 20 December 2006 Paper

Fabrication processes of MEMS phase shifters on polymer-based substrates

Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Lun-Chen Hsu, W. Alan Davis, Mu Chiao, J.-C. Chiao

Proceedings Volume 6415, 641515 (2006) https://doi.org/10.1117/12.695577

KEYWORDS: Microelectromechanical systems, Bridges, Phase shifts, Polymers, Telecommunications, Photoresist materials, Silicon, Dielectrics, Capacitance, Metals

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Proceedings Article | 5 January 2006 Paper

Fabrication techniques and RF performances of transmission lines on polymer substrates

Jianqun Wang, Ying Cai, Thermpon Ativanichayaphong, Mu Chiao, J.-C. Chiao

Proceedings Volume 6035, 60351M (2006) https://doi.org/10.1117/12.637975

KEYWORDS: Silicon, Polymers, Signal attenuation, Dielectrics, Finite element methods, Etching, Glasses, Microelectromechanical systems, Fabrication, Waveguides

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Proceedings Article | 5 January 2006 Paper

Design considerations of reconfigurable antennas using MEMS switches

Thermpon Ativanichayaphong, Ying Cai, Jianqun Wang, Mu Chiao, J.-C. Chiao

Proceedings Volume 6035, 60351Y (2006) https://doi.org/10.1117/12.639015

KEYWORDS: Antennas, Switches, Microelectromechanical systems, Beam steering, Switching, Finite-difference time-domain method, Electrodes, Waveguides, Metals, Telecommunications

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Proceedings Article | 4 January 2006 Paper

Design and modeling of a high accuracy three degrees of freedom MEMS manipulator

Shyam Venugopal, Lun-Chen Hsu, Smitha Malalur-Nagaraja-Rao, B. P. Wang, Mu Chiao, J.-C. Chiao

Proceedings Volume 6037, 60371Y (2006) https://doi.org/10.1117/12.639904

KEYWORDS: Actuators, Calibration, Microelectromechanical systems, Kinematics, Finite element methods, In vivo imaging, Motion models, Error analysis, Thermal modeling, Mathematical modeling

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Proceedings Article | 11 July 2002 Paper

Vacuum packaging of microresonators by rapid thermal processing

Mu Chiao, Liwei Lin

Proceedings Volume 4700, (2002) https://doi.org/10.1117/12.475039

KEYWORDS: Packaging, Microresonators, Semiconducting wafers, Glasses, Wafer bonding, Silicon, Resonators, Microelectromechanical systems, Surface micromachining, Aluminum

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Showing 5 of 10 publications

Conference Committee Involvement (15)

Micromachining and Microfabrication Process Technology XVIII

5 February 2013 | San Francisco, California, United States

Micromachining and Microfabrication Process Technology XVII

25 January 2012 | San Francisco, California, United States

Micromachining and Microfabrication Process Technology XVI

25 January 2011 | San Francisco, California, United States

Micromachining and Microfabrication Process Technology XV

26 January 2010 | San Francisco, California, United States

Nano-, Bio-, and Info-Tech Sensors and Systems

9 March 2009 | San Diego, California, United States

Micromachining and Microfabrication Process Technology XIV

27 January 2009 | San Jose, California, United States

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV

10 December 2008 | Melbourne, Australia

Micromachining and Microfabrication Process Technology XIII

22 January 2008 | San Jose, California, United States

MEMS/MOEMS Technologies and Applications III

12 November 2007 | Beijing, China

Micromachining and Microfabrication Process Technology XII

22 January 2007 | San Jose, California, United States

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III

11 December 2006 | Adelaide, Australia

Micromachining and Microfabrication Process Technology XI

25 January 2006 | San Jose, California, United States

Device and Process Technologies for Microelectronics, MEMS, and Photonics IV

12 December 2005 | Brisbane, Australia

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

13 December 2004 | Sydney, Australia

Device and Process Technologies for Microelectronics, MEMS, and Photonics

10 December 2003 | Perth, Australia

Showing 5 of 15 Conference Committees

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