Prof. Mu Chiao
at Univ of British Columbia
SPIE Involvement:
Conference Program Committee | Author
Publications (10)

Proceedings Article | 30 December 2008
Proc. SPIE. 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
KEYWORDS: Oxides, Sensors, Electrodes, Polymers, Ions, Silver, Chromium, Sol-gels, Environmental sensing, Iridium

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Actuators, Gold, Optical fibers, Electrodes, Dielectrics, Reflectivity, Scanning electron microscopy, Optical scanning, Structural design, Mechanical engineering

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Waveguides, Polymers, Glasses, Dielectrics, Silicon, Capacitance, Telecommunications, Bridges, Phase shifts

Proceedings Article | 8 January 2007
Proc. SPIE. 6414, Smart Structures, Devices, and Systems III
KEYWORDS: Actuators, Microscopes, Capacitors, Sensors, Silicon, Resistance, Reflectivity, Finite element methods, Optical switching, Thermal modeling

Proceedings Article | 8 January 2007
Proc. SPIE. 6414, Smart Structures, Devices, and Systems III
KEYWORDS: Microelectromechanical systems, Actuators, Gold, Electrodes, Dielectrics, Scanning electron microscopy, Finite element methods, Mechanical engineering, Electrical breakdown, Temperature metrology

Showing 5 of 10 publications
Conference Committee Involvement (15)
Micromachining and Microfabrication Process Technology XVIII
5 February 2013 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVII
25 January 2012 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVI
25 January 2011 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XV
26 January 2010 | San Francisco, California, United States
Nano-, Bio-, and Info-Tech Sensors and Systems
9 March 2009 | San Diego, California, United States
Showing 5 of 15 Conference Committees
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