Dr. Mukesh Kumar Profile

Dr. Mukesh Kumar

at Kurukshetra Univ

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Author

Publications (4)

Proceedings Article | 4 January 2006 Paper

Nitridation of thin metal layers by plasma immersion ion implantation for diffusion barrier applications

Mukesh Kumar, Rajkumar Rajkumar, Dinesh Kumar

Proceedings Volume 6037, 60371E (2006) https://doi.org/10.1117/12.638332

KEYWORDS: Ion implantation, Nitrogen, Plasma, Tantalum, Metals, Titanium, Diffusion, Silicon, X-ray diffraction, Ions

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Proceedings Article | 14 October 2003 Paper

Enhancement of diffusion barrier properties of Ta by plasma immersion ion implantation

Mukesh Kumar, Raj Kumar, Dinesh Kumar, P. Raole, P. George, Suryakant Gupta, D. Paul

Proceedings Volume 5062, (2003) https://doi.org/10.1117/12.514859

KEYWORDS: Copper, Tantalum, Diffusion, Nitrogen, Plasma, Resistance, Annealing, Ion implantation, Scanning electron microscopy, Ions

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Proceedings Article | 21 April 2003 Paper

Diffusion barrier layer fabrication by plasma immersion ion implantation

Mukesh Kumar, - Rajkumar, Dinesh Kumar, P. George, A. Paul

Proceedings Volume 5117, (2003) https://doi.org/10.1117/12.501329

KEYWORDS: Copper, Titanium, Diffusion, Annealing, Metals, Nitrogen, Resistance, Silicon, Tin, Plasma

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Proceedings Article | 27 December 2001 Paper

Effects of nitrogen plasma immersion ion implantation in silicon

Raj Kumar, Mukesh Kumar, P. George, K. Chari, Subroto Mukherjee

Proceedings Volume 4468, (2001) https://doi.org/10.1117/12.452548

KEYWORDS: Silicon, Ions, Nitrogen, Plasma, Ion implantation, Semiconducting wafers, Scanning electron microscopy, Sputter deposition, Silicon films, Gold

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