Dr. Mukesh Kumar
at Kurukshetra Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Titanium, Metals, X-ray diffraction, Ions, Silicon, Diffusion, Nitrogen, Ion implantation, Tantalum, Plasma

Proceedings Article | 14 October 2003
Proc. SPIE. 5062, Smart Materials, Structures, and Systems
KEYWORDS: Annealing, Copper, Ions, Diffusion, Nitrogen, Resistance, Scanning electron microscopy, Ion implantation, Tantalum, Plasma

Proceedings Article | 21 April 2003
Proc. SPIE. 5117, VLSI Circuits and Systems
KEYWORDS: Titanium, Metals, Annealing, Copper, Silicon, Diffusion, Nitrogen, Resistance, Plasma, Tin

Proceedings Article | 27 December 2001
Proc. SPIE. 4468, Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing
KEYWORDS: Gold, Sputter deposition, Ions, Silicon, Nitrogen, Scanning electron microscopy, Silicon films, Ion implantation, Semiconducting wafers, Plasma

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