Mr. Mukund K. Raghunathan
Applications Manager at KLA Tencor Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Refractive index, Waveguides, Cladding, Etching, Polymers, Silicon, Photoresist materials, Plasma etching, Liquids, Polymer multimode waveguides

PROCEEDINGS ARTICLE | January 17, 2005
Proc. SPIE. 5644, Optoelectronic Devices and Integration
KEYWORDS: Refractive index, Microfluidics, Waveguides, Cladding, Etching, Polymers, Photoresist materials, Plasma etching, Semiconducting wafers, Polymer multimode waveguides

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