Mumit Khan
at Univ of Wisconsin-Madison
SPIE Involvement:
Publications (14)

Proceedings Article | 20 May 2004 Paper
James Taylor, Daniel Malueg, Franco Cerrina, Mumit Khan, Don Thielman
Proceedings Volume 5374, (2004)
KEYWORDS: Photomasks, X-rays, Semiconducting wafers, Phase shifts, Silicon, Lithography, Wavefronts, Silicon carbide, Beam propagation method, Photoresist materials

Proceedings Article | 20 August 2001 Paper
Mumit Khan, Geng Han, Juan Maldonado, Franco Cerrina
Proceedings Volume 4343, (2001)
KEYWORDS: Photomasks, Photons, Electrons, Absorption, Diffraction, X-ray lithography, Diamond, Silicon, Printing, Semiconducting wafers

Proceedings Article | 21 July 2000 Paper
Lei Yang, Mumit Khan, James Taylor, Yuli Vladimirsky, Niru Dandekar
Proceedings Volume 3997, (2000)
KEYWORDS: Photomasks, Phase shifts, X-rays, Phase shifting, X-ray lithography, Lithography, X-ray sources, Critical dimension metrology, Gold, Silicon carbide

Proceedings Article | 25 June 1999 Paper
Quinn Leonard, Jaz Bansel, Lei Yang, Olga Vladimirsky, Srinivas Bollepalli, Mumit Khan, Yuli Vladimirsky, Franco Cerrina, James Taylor, Klaus Simon, Lynn Rathbun, Richard Tiberio
Proceedings Volume 3676, (1999)
KEYWORDS: Photomasks, X-rays, Gold, Etching, X-ray lithography, Photoresist materials, Lithography, Silicon, Electron beam lithography, Scanning electron microscopy

Proceedings Article | 8 June 1998 Paper
Luca Cazzanti, Mumit Khan, Franco Cerrina
Proceedings Volume 3332, (1998)
KEYWORDS: Neural networks, Process modeling, Computer simulations, Data modeling, Performance modeling, Image processing, Semiconductor manufacturing, Neurons, Solid modeling, Computer aided design

Showing 5 of 14 publications
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