FMBA(Fast Moving Ball Actuator), developed as novel electronic-paper display, has already proven its operability and functionality. However, optimization issues related with low operating voltage, high refresh rate, fine pixel and higher display resolution, etc. are still remaining to be improved for a successful commercialization. In order to optimize such issues effectively, static and transient model were developed and verified by comparing the calculated results to the measured. The static model is based on the force balancing equation between the driving and the holding forces while the transient model is developed from Newton’s 2nd law by adding the inertia as well as the resistive damping forces caused by the surroundings. With the simplified static model, driving voltage of 30.71 V was obtained, which is reasonably matched to the measured voltage of 40 V. Based on the transient model, also, the transient response of the device can be estimated within reasonable margin. Considering the absence of reliable key parameters of surface roughness, static and dynamic frictional coefficient, and refractive indices, the developed static and transient models account well the experimental results and thus they are expected to contribute further improvements in FMBA.
An investigation of a VO2 etch mechanism in Cl2/Ar inductively coupled plasma under the condition of low ion bombardment energy is carried out. It is found that an increase in Ar mixing ratio results a nonmonotonic VO2 etch rate, which reaches a maximum of 70 to 80 nm/min at 70 to 75% Ar. The model-based analysis of the etch mechanism shows that the VO2 etch kinetics correspond to the ion-flux-limited etch regime. This is most likely due to the domination of low volatile VCl3 and/or VCl2 in the reaction products.