MunSik Kim
at SK Hynix Inc
SPIE Involvement:
Publications (18)

Proceedings Article | 23 October 2015 Paper
Proceedings Volume 9635, 96351J (2015)
KEYWORDS: Quartz, Etching, Deposition processes, Photomasks, Critical dimension metrology, Phase shifts, Scanning electron microscopy, Particles, Chromium, Image restoration

Proceedings Article | 9 July 2015 Paper
Proceedings Volume 9658, 965806 (2015)
KEYWORDS: Quartz, Photomasks, Critical dimension metrology, Distortion, Light scattering, Silica, Particles, Surface roughness, Optical lithography, Defect detection

Proceedings Article | 16 September 2014 Paper
Proceedings Volume 9235, 92350G (2014)
KEYWORDS: Photomasks, Inspection, Particles, Scanning electron microscopy, Manufacturing, Image processing, Chromium, Defect detection, Defect inspection, Transmittance

Proceedings Article | 26 May 2010 Paper
Kangjoon Seo, MunSik Kim, Sang Chul Kim, JaeCheon Shin, ChangYeol Kim, John Miller, Aditya Dayal, Trent Hutchinson, KiHun Park
Proceedings Volume 7748, 77480N (2010)
KEYWORDS: Photomasks, Reticles, Inspection, Critical dimension metrology, Reflectivity, Semiconducting wafers, Scanning electron microscopy, Manufacturing, Data processing, Scanners

Proceedings Article | 20 March 2009 Paper
Proceedings Volume 7271, 727144 (2009)
KEYWORDS: Extreme ultraviolet, Critical dimension metrology, Extreme ultraviolet lithography, Semiconducting wafers, Lithography, Photomasks, Scanning electron microscopy, Wafer testing, Silicon, Light scattering

Showing 5 of 18 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top