Munenori Fukunishi
at Olympus America Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 27 February 2015
Proc. SPIE. 9404, Digital Photography XI
KEYWORDS: Video acceleration, Data modeling, Cameras, Sensors, Calibration, Image processing, Transform theory, Image sensors, Prototyping, Device simulation

Proceedings Article | 24 May 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Electron beams, Defect detection, Imaging systems, Image processing, Inspection, Image analysis, Scanning electron microscopy, Wafer inspection, Semiconducting wafers, Defect inspection

Proceedings Article | 15 July 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Electron beams, Defect detection, Particles, Manufacturing, Inspection, Optical inspection, Image classification, Semiconducting wafers, Product engineering, Defect inspection

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