Dr. Munib Wober
at Harvard Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 18, 2010
Proc. SPIE. 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon
KEYWORDS: Photodetectors, Silica, Etching, Silicon, Photodiodes, Image sensors, Photomasks, Reactive ion etching, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | February 16, 2010
Proc. SPIE. 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
KEYWORDS: Amorphous silicon, Oxides, Silica, Etching, Dielectrics, Silicon, Scanning electron microscopy, Photoresist materials, Photomasks, Reactive ion etching

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