Dr. Munirathna Padmanaban
Senior Engineering Manager at JSR Micro Inc
SPIE Involvement:
Author
Area of Expertise:
Polymer Science & Technology , Resist Chemistry and processing , Lithography , Photochemistry , Underlayers , Bottom anti-reflective coatings
Profile Summary

Expert in materials for lithography applications with over 30 years of experience in research and development to commercialization. Internationally recognized scientist with good Japanese language capability. More than 100 published papers, 20 issued patents and 50 published patent applications. Have managed research and engineering departments of multinational companies.
Publications (48)

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Annealing, Directed self assembly, High volume manufacturing, Nanolithography, Thin film manufacturing, Resolution enhancement technologies, Temperature metrology

Proceedings Article | 7 April 2017 Paper
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Oxides, Optical lithography, Contamination, Etching, Metals, Silicon, Reflectivity, Photomasks, System on a chip, Plasma

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Silicon, Resistance, Oxygen, Semiconducting wafers

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Optical lithography, Polymers, Coating, Thin film coatings, Semiconducting wafers

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Oxides, Etching, Metals, Dielectrics, Silicon, Coating, Resistance, Photomasks, Plasma etching, Semiconducting wafers

Showing 5 of 48 publications
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