Dr. Munkang Choi
at Synopsys Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 13, 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Ions, Solids, Photomasks, Shape analysis, Transistors, Optical proximity correction, Line edge roughness, TCAD, Device simulation, Channel projecting optics

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