Dr. Muralidhar K. Ghantasala
Professor at Western Michigan Univ
SPIE Involvement:
Conference Program Committee | Symposium Chair | Author
Publications (28)

PROCEEDINGS ARTICLE | March 31, 2010
Proc. SPIE. 7644, Behavior and Mechanics of Multifunctional Materials and Composites 2010
KEYWORDS: Microelectromechanical systems, Mechanics, Polymers, Ions, Hydrogen, Diffusion, Computer simulations, Finite element methods, Biological and chemical sensing, Chemical elements

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7289, Behavior and Mechanics of Multifunctional Materials and Composites 2009
KEYWORDS: Scattering, Nanoparticles, Capillaries, Particles, X-rays, Magnetism, Adaptive optics, Transmission electron microscopy, Bismuth, Photomicroscopy

PROCEEDINGS ARTICLE | December 21, 2007
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Actuators, Ions, Diffusion, Finite element methods, Sodium, Chlorine, Chemical elements, Systems modeling, Focus stacking software, Temperature metrology

SPIE Journal Paper | July 1, 2007
JM3 Vol. 6 Issue 03
KEYWORDS: Silicon, Titanium, Gold, Metals, Copper, Chromium, Polymethylmethacrylate, Semiconducting wafers, X-ray lithography, Chemical analysis

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Confocal microscopy, Copper, Silicon, Resistance, Magnetism, Photoresist materials, Photomasks, Semiconducting wafers, Electroplating, Electromagnetism

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Optical lithography, Etching, Metals, Ions, Surface roughness, Photoresist materials, Photonics, Photomasks, Plasma etching, Plasma

Showing 5 of 28 publications
Conference Committee Involvement (2)
Device and Process Technologies for Microelectronics, MEMS, and Photonics
10 December 2003 | Perth, Australia
Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS
10 December 1997 | Adelaide, Australia
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top