Mr. Muralidhara Rao Profile

Muralidhara Rao

at Indian Institute of Technology Madras

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Author

Publications (3)

Proceedings Article | 17 February 2010 Paper

Estimation of tool wear compensation during micro-electro-discharge machining of silicon using process simulation

. Muralidhara, Nilesh Vasa, Singaperumal M.

Proceedings Volume 7590, 75900K (2010) https://doi.org/10.1117/12.845953

KEYWORDS: Silicon, Micromachining, Copper, Microfabrication, Microelectromechanical systems, Sensors, Control systems, Semiconducting wafers, Electrodes, Dielectric filters

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Proceedings Article | 17 February 2010 Paper

Investigation on particle generation by micro-electro discharge machining

Sourav Mitra, . Muralidhara, N. Vasa, Singaperumal M.

Proceedings Volume 7590, 75900J (2010) https://doi.org/10.1117/12.845709

KEYWORDS: Particles, Dielectrics, Nanoparticles, Aluminum, Metals, Process modeling, Atmospheric modeling, Heat flux, Liquids, Microfluidics

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SPIE Journal Paper | 1 January 2010

Wear-ratio-based tool wear compensation for microelectrodischarge-machining of silicon through process simulation

Muralidhara Rao, Nilesh Vasa, Makram Singaperumal

JM3, Vol. 9, Issue 01, 013040, (January 2010) https://doi.org/10.1117/12.10.1117/1.3280262

KEYWORDS: Silicon, Micromachining, Semiconducting wafers, Copper, Process modeling, Prototyping, Control systems, Sensors, Process control, Semiconductor materials

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