Muralidhara Rao
at Indian Institute of Technology Madras
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV
KEYWORDS: Microfluidics, Nanoparticles, Metals, Particles, Dielectrics, Aluminum, Heat flux, Atmospheric modeling, Process modeling, Liquids

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV
KEYWORDS: Microelectromechanical systems, Sensors, Electrodes, Copper, Silicon, Control systems, Micromachining, Dielectric filters, Microfabrication, Semiconducting wafers

SPIE Journal Paper | January 1, 2010
JM3 Vol. 9 Issue 01
KEYWORDS: Silicon, Micromachining, Semiconducting wafers, Copper, Process modeling, Prototyping, Control systems, Sensors, Process control, Semiconductor materials

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