Dr. Murat Pak Profile

Dr. Murat Pak

at imec

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 21 November 2023 Presentation + Paper

Litho process development for pillars to enable high density 4f2 memory cells at 34nm pitch

M. Pak, A. Dauendorffer, K. Nafus, A. Das, M. Hasan, P. Delgadillo

Proceedings Volume 12750, 1275004 (2023) https://doi.org/10.1117/12.2686265

KEYWORDS: Silicon carbide, Standards development, Optical lithography, Extreme ultraviolet lithography, Array processing, Printing, Photoresist processing, Design and modelling

Read Abstract +

Proceedings Article | 26 May 2022 Paper

Orthogonal array pillar process development for high density 4F2 memory cells at 40nm pitch and beyond

Murat Pak, Wesley Zanders, Patrick Wong, Sandip Halder, Romuald Blanc, Laurent Souriau, Jeonghoon Lee, Gouri Sankar Kar

Proceedings Volume 12051, 120510J (2022) https://doi.org/10.1117/12.2618761

KEYWORDS: Semiconducting wafers, Photoresist materials, Array processing, Extreme ultraviolet lithography, Optical lithography, Finite element methods, Etching, Electroluminescence, Critical dimension metrology, Scanning electron microscopy

Read Abstract +

Proceedings Article | 26 March 2019 Presentation + Paper

LCDU optimization of STT-MRAM 50nm pitch MTJ pillars for process window improvement

Murat Pak, Davide Crotti, Farrukh Yasin, Monique Ercken, Sandip Halder, Danilo De Simone, Pieter Vanelderen, Laurent Souriau, Hubert Hody, Gouri Sankar Kar

Proceedings Volume 10957, 109570R (2019) https://doi.org/10.1117/12.2515023

KEYWORDS: Etching, Optical lithography, Semiconducting wafers, Critical dimension metrology, Resistance, Magnetism, Photoresist processing, Manufacturing, Printing, Extreme ultraviolet lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years