Mr. Murilo B. da Silva
at CNPEM
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Metrology, Optical metrology, Interferometry, Nano opto mechanical systems, X-ray optics, Calibration, Optical fabrication, Signal attenuation, Temperature metrology

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