Dr. Muthiah Thiyagarajan
Research Scientist at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Optical lithography, Polymers, Glasses, Fourier transforms, Chemical reactions, Photoresist processing, Semiconducting wafers, Industrial chemicals, Resolution enhancement technologies

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Polymers, Diffusion, Control systems, Line width roughness, Transistors, Critical dimension metrology, Line edge roughness, Photoresist processing, Semiconducting wafers

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Carbon, Contamination, Calibration, Polymers, Diffusion, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Electron beam lithography, Polymethylmethacrylate, Polymers, Resistance, Scanning electron microscopy, Polymerization, Extreme ultraviolet lithography, Photomicroscopy, Chemically amplified resists

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Electron beam lithography, Etching, Polymers, Resistance, Silicon films, Plasma etching, Reactive ion etching, Nanocomposites, Plasma

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top