My Pham
at Konkuk Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2008
Proc. SPIE. 6931, Nanosensors and Microsensors for Bio-Systems 2008
KEYWORDS: Actuators, Polymethylmethacrylate, Ferroelectric materials, Ceramics, Fabrication, Silicon, Manufacturing, Semiconducting wafers, Composites, Microelectromechanical systems

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