Mr. Myunghoon Seong Profile

Myunghoon Seong

at Univ of California Los Angeles

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Publications (1)

Proceedings Article | 22 April 2008 Paper

Development of a high flow-rate/high operating frequency nitinol MEMS valve

Myunghoon Seong, K. Mohanchandra, Yohan Lin, Gregory Carman

Proceedings Volume 6932, 69322F (2008) https://doi.org/10.1117/12.775812

KEYWORDS: Microelectromechanical systems, Actuators, Chromium, Finite element methods, Sensors, Data modeling, Silicon, Thin films, Polymers, Sputter deposition

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