Myunghoon Seong
at Univ of California Los Angeles
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 April 2008
Proc. SPIE. 6932, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2008
KEYWORDS: Microelectromechanical systems, Actuators, Chromium, Finite element methods, Sensors, Data modeling, Silicon, Thin films, Polymers, Sputter deposition

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