Dr. Nadav Gutman
Principal Scientist at KLA Israel
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Calibration, Scanning electron microscopy, Optical calibration, Overlay metrology

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Lithography, Diffraction, Metrology, Calibration, Scanners, Scatterometry, Finite element methods, Photomasks, Semiconducting wafers, Phase shifts

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