Nadine N. B. Bicais-Lepinay
Physical Characterization Engineer at STMicroelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Contamination, Particles, Silicon, Inspection, Nondestructive evaluation, Platinum, Scanning electron microscopy, Transmission electron microscopy, Semiconducting wafers, Gallium

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