Dr. Nadir S. Faradzhev
at National Institute of Standards and Technology
SPIE Involvement:
Publications (6)

Proceedings Article | 1 April 2013 Paper
Proceedings Volume 8679, 867920 (2013) https://doi.org/10.1117/12.2011663
KEYWORDS: Semiconducting wafers, Carbon, Extreme ultraviolet, Contamination, Photoresist materials, Extreme ultraviolet lithography, Mirrors, Molecules, Manufacturing, Scanners

Proceedings Article | 26 March 2011 Paper
Proceedings Volume 7969, 79690M (2011) https://doi.org/10.1117/12.879852
KEYWORDS: Contamination, Extreme ultraviolet lithography, Extreme ultraviolet, EUV optics, Carbon, Molecules, Synchrotrons, Mirrors, Ruthenium, Spectroscopic ellipsometry

Proceedings Article | 23 March 2010 Paper
Rashi Garg, Nadir Faradzhev, Shannon Hill, Lee Richter, P. S. Shaw, R. Vest, T. Lucatorto
Proceedings Volume 7636, 76361Z (2010) https://doi.org/10.1117/12.855967
KEYWORDS: Carbon, EUV optics, Imaging systems, Extreme ultraviolet, Extreme ultraviolet lithography, Dielectrics, Polarizers, Ellipsometry, Contamination, Thin films

Proceedings Article | 20 March 2010 Paper
Proceedings Volume 7636, 76360E (2010) https://doi.org/10.1117/12.846849
KEYWORDS: Contamination, Extreme ultraviolet lithography, Carbon, Molecules, Extreme ultraviolet, Protactinium, EUV optics, Adsorption, Synchrotrons, Electrons

Proceedings Article | 18 March 2009 Paper
Proceedings Volume 7271, 727113 (2009) https://doi.org/10.1117/12.814111
KEYWORDS: Contamination, Extreme ultraviolet lithography, Protactinium, Molecules, Extreme ultraviolet, Reflectivity, Carbon, Synchrotrons, Molecular interactions, Titanium dioxide

Showing 5 of 6 publications
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