CONFERENCE PROCEEDINGS
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Nagaraj Batta
EPM at NVIDIA
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Author
Publications (2)
PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Thin films, FT-IR spectroscopy, Particles, Silicon, Nitrogen, Semiconductor lasers, Aluminum, Excimer lasers, Silicon carbide, Toxic industrial chemicals
PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Carbon, Scanning electron microscopy, Raman spectroscopy, Micro raman spectroscopy, Laser irradiation, Near field, Deposition processes, Photomicroscopy, Liquids, Near field optics
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