Nagaraj Chary Chary Samboju
CAE at Synopsys (I) Pvt Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Manufacturing, Legal, Printing, Extreme ultraviolet lithography, Immersion lithography, Standards development, 193nm lithography

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