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Nam Thanh Tran
at Norwegian Univ of Science and Technology
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Publications (1)
Proceedings Article | 9 May 2014 Paper
High precision AlGaAsSb ridge-waveguide etching by in situ reflectance monitored ICP-RIE
N. Tran, Magnus Breivik, S. Patra, Bjørn-Ove Fimland
Proceedings Volume 9134, 91342E (2014) https://doi.org/10.1117/12.2052615
KEYWORDS: Etching, Reflectivity, Waveguides, Refractive index, Optical simulations, Semiconductor lasers, Cladding, Gallium antimonide, Signal processing, Process control
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