Namjae Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Phase modulation, Lithography, Image classification, Library classification systems, Visualization, Process modeling, Design for manufacturing, Manufacturing, Yield improvement, Land mines

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