The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the
industrial society. The interest of the world is concentrated on information technology, Nano-technology and
biotechnology. In particular, the Nano-technology of which study was originally started from an alternative for
overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information
and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can
change civilization of human beings. Specially, ultra precision machining is quickly applied to Nano-technology in the
field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super
precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super
precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending
on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect
of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.
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